Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Journal title: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN: 10846999
E-ISSN: -
Publisher: Institute of Electrical and Electronics Engineers Inc.
Country: United States
Subject: Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
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